Flow Regimes & Conductance Reference Card

Module 03 — Gas Flow & Conductance | VacTech, Selkirk College

Three Flow Regimes

Regime Knudsen (Kn) Pressure Range* Gas Behaviour Everyday Analogy
Viscous Kn < 0.01 > ~2.5 mbar
(25 mm tube)
Molecules collide with each other far more often than with walls. Gas behaves like a fluid. Flow is driven by pressure gradient. A crowd pushing through a wide corridor — people bump into each other, forming a stream.
Transition 0.01 < Kn < 1 ~0.03 – ~2.5 mbar
(25 mm tube)
Mix of molecule-molecule and molecule-wall collisions. Neither viscous nor fully molecular. Hardest regime to model. A moderately busy corridor — sometimes you bump others, sometimes you bounce off the walls.
Molecular Kn > 1 < ~0.03 mbar
(25 mm tube)
Molecules travel wall-to-wall without hitting each other. Each molecule acts independently. Gas has no viscosity. An empty gymnasium — each person bounces between walls without ever meeting another person.

*Pressure boundaries depend on tube diameter. Values shown are for a 25 mm (KF25) tube with air at 20 °C. Kn = (mean free path) / (tube diameter).

Conductance Rules Summary

Series Conductance

1/Ctotal = 1/C1 + 1/C2 + …

Elements in series: total conductance is less than the smallest individual conductance. The narrowest pipe dominates.

Parallel Conductance

Ctotal = C1 + C2 + …

Elements in parallel: conductances add together. Multiple paths always improve total conductance.

Viscous Flow Scaling

Cvisc ∝ D4 / L

Conductance scales with 4th power of diameter. Doubling the pipe diameter gives 16× the conductance. Keep pipes short and wide.

Molecular Flow Scaling

Cmol ∝ D3 / L

Conductance scales with 3rd power of diameter. Doubling the pipe diameter gives the conductance. Still severe undersizing penalty.

Effective Pumping Speed

1/Seff = 1/Spump + 1/C

The effective pumping speed at the chamber is always less than the pump’s rated speed. A restrictive pipe wastes pump capacity.

Practical Rule of Thumb

C ≥ 3 × Spump

Design guideline: total conductance of the foreline should be at least 3× the pump speed to deliver ≥ 75% of rated speed at the chamber.

Anatomy of a Pumpdown — Four Regions

1

Volume Evacuation

Rapid pressure drop as bulk gas is removed. Pump is at full throughput. Pressure falls exponentially.

950 → ~10 mbar
2

Flow Transition

Flow changes from viscous to transition. Pump speed may reduce. Desorbed water becomes noticeable.

~10 → ~0.1 mbar
3

Outgassing Limited

Pressure drop slows dramatically. Surface outgassing is now the dominant gas load. Pumpdown curve “bends.”

~0.1 → ~0.01 mbar
4

Base Pressure

System reaches equilibrium: pump speed matches total gas load. Further improvement requires bakeout or better seals.

< 0.01 mbar

Pressures shown are typical for a clean, small industrial system with a rotary vane pump starting from Selkirk atmospheric (~950 mbar).