Contamination Diagnostic Decision Tree

Module 02 — Contamination & Gas Loads | VacTech, Selkirk College
Pumpdown slower than expected?
Q1
Rate-of-rise test result:
Linear or decaying pressure rise?
LINEAR
Real leak detected
Check all seals, fittings, and welds.
Use helium leak detection to locate.
DECAYING
Q2
Was the system recently
opened or vented?
YES
Outgassing
Extended pump time or
mild bakeout (60–120 °C)
NO
Q3
Hydrocarbon
contamination visible?
YES
🧴 Clean
IPA wipe, replace
O-rings if swollen
NO
Q4
H₂O dominant
on RGA?
YES
Moisture
Bakeout required
NO
Virtual leak
Check trapped volumes