R3-A Overview
Diagnostic Rig with RGA Port
| Target Pressure | ATM → ~10⁻⁹ mbar |
| HV Pump | Turbomolecular pump (same as R2-A) |
| Backing Pump | Rotary vane pump (same as R2-A) |
| Chamber Gauge | UPGRADED CDG (was Pirani) |
| HV Gauge | UPGRADED Hot cathode (was cold cathode) |
| New Feature | NEW RGA port (capped, escalation-only) |
| Vent Topology | CHANGED Vent → manifold (was → chamber) |
Key teaching points for R3-A: Why upgrade gauges? CDG eliminates Pirani's gas-species dependence and thermal drift. Hot cathode extends range to 10⁻¹⁰ mbar (vs cold cathode's 10⁻⁸). The RGA port shows learners how real systems are designed for future diagnostic capability without installing expensive equipment upfront.
Vent topology change: Venting to the manifold (instead of directly to the chamber) is a more controlled approach — atmospheric gas enters the manifold first, allowing pressure equalisation before reaching the chamber. This reduces the risk of pressure shock to sensitive components (turbo pump, gauges).