R1-A: Single-Stage Roughing Rig

ATM → ~10⁻² mbar | 6 core + 2 inline components | Click any component for details

R1-A Overview

Single-Stage Roughing Rig — Simplified
6 core + 2 inline components
System Specs
TargetATM → ~10⁻² mbar
Components6 core + 2 inline
StatesVENTED / ROUGHING / ISOLATED
Gas Flow Paths
ROUGHING: R1-CH → R1-V-ISO → R1-L-FL → R1-P-RP → R1-FLT-EXH → ATM
VENT: ATM → R1-FLT-VENT → R1-L-VENT → R1-V-VENT → R1-CH
VENT PATH ROUGHING PATH R1-L-VENT R1-L-FL R1-L-EXH Roughing flow ATM R1-FLT-VENT R1-V-VENT CHAMBER R1-CH Process-style SS G-CH R1-G-CH R1-V-ISO R1-P-RP R1-FLT-EXH ATM R1-G-BX ~950 mbar Component Colours Pump Valves Gauge Filters Chamber