R1-A: Single-Stage Roughing Rig
ATM → ~10⁻² mbar | 6 core + 2 inline components | Click any component for details
R1-A Overview
Single-Stage Roughing Rig — Simplified
6 core + 2 inline components
System Specs
Target
ATM → ~10⁻² mbar
Components
6 core + 2 inline
States
VENTED / ROUGHING / ISOLATED
Gas Flow Paths
ROUGHING:
R1-CH
→
R1-V-ISO
→
R1-L-FL
→
R1-P-RP
→
R1-FLT-EXH
→ ATM
VENT:
ATM →
R1-FLT-VENT
→
R1-L-VENT
→
R1-V-VENT
→
R1-CH
VENT PATH
ROUGHING PATH
R1-L-VENT
R1-L-FL
R1-L-EXH
Roughing flow
ATM
R1-FLT-VENT
R1-V-VENT
CHAMBER
R1-CH
Process-style SS
G-CH
R1-G-CH
R1-V-ISO
R1-P-RP
R1-FLT-EXH
ATM
R1-G-BX
~950 mbar
Component Colours
Pump
Valves
Gauge
Filters
Chamber